Picture of Ion implantation online characterization
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The experimental setup is directly connected to the beam line of a MeV ion implanter and allows for electrical and optical characterization, such as deep-level transient spectroscopy (DLTS), steady-state photo-capacitance (SSPC) measurements or thermal admittance spectroscopy (TAS). Measurements can be performed in the temperature range from 30 K to 300 K, and it is also possible to perform measurements after irradiation or ion implantation at low temperatures.

The setup consists of several components, e.g., measurement instruments and a system for optical excitation/detection. LabView programs are mainly used for controlling the components.

Tool name:
Ion implantation online characterization
Area/room:
Clean Room
Category:
Characterization
Manufacturer:
Custom made
Model:
NA
Tool rate:
A
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hours
Max booking time, night:
hours
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