The Flextrua cluster growth tool at the Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is connected to an analysis chamber for advanced sample characterization. A plethora of concomitant surface science techniques are available that utilise a variety of photon sources, a state-of-the-art hemispherical electron analyser and low energy electron diffraction optics. The XPS system can resolve the chemical composition (stoichiometry) and elemental chemical environment.
System manipulator: Motorised sample manipulator accommodating up to 20 samples with max dimensions of 10x10x1 mm samples. Smaller surface area samples can be measured down to 3x3 mm. XPS analysis on all samples pockets possible.
Low vacuum: 5x10-7 - 5x10-10 mBar base pressure.
Source: XR-50 Twin anode X-ray source for 1253.6 eV and 1486.7 eV photons.
Analyser: PHOIBOS 150 hemisphere electron analyser and 2D CCD detector with real space and angle resolving lens modes.
XPS resolution: 0.2 eV.
Lateral resolution: 0.01 mm.