Secondary electron (SE) detector (Everhardt-Thornley, E-T).
Backscattered electron (BSE) detector (Si P-N junction semiconductor detector).
Thermo Scientific Ultra Dry silicon drift X-ray detector (SSD) 60 mm2 with Norvar light element window and energy resolution (MnKα FWHM) at 127.8 eV, running on a Noran System 7 (Pathfinder software) for semi-quantitative elemental analysis and mapping.
Delmic SPARC Cathodoluminescence system, running on the ODEMIS software.
Sample dimensions: Large chamber accommodating samples up to 200 mm in diameter and 50 mm in height.
Temperature range: -185 °C to 200 °C. Gatan C1002 cooling/heating stage and temperature controller Gatan Model 10905.
Motorized stage: 5-axis motorized stage with eucentric tilt (-10 to 65°) and 360° rotation.
Electron gun: Thermionic-emission LaB6 electron gun.
Accelerating Voltage: 0.3 – 30 kV.
Resolution: 3 nm (30 kV, WD 8 mm, SE); 4 nm (30 kV, WD 5 mm, 10 Pa, BSE).
Magnification: 5 – 300k ×.
Low Vacuum Mode: 10 – 650 Pa.