Picture of Cross Section Polisher
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Composed of a specimen chamber that is evacuated by a turbo-molecular pump, ion source and an X an Y stage-drive specimen stage. The polisher emits an ion bean perpendicular to the specimen, and the beam cuts the specimen along the border of a shielding plate. An air isolation system and a specimen cooling system is also included. The maximum specimen size is 11mm (W) x 8mm (L) x 3mm (T).

Tool name:
Cross Section Polisher
Area/room:
Corridor O2.1A
Category:
Other processes
Manufacturer:
Jeol
Model:
IB-19520CCP
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

You must be logged in to view tool modes.