Instrument model:
Technology Description:
Technical Information:
Accelerating voltage: 2 - 8 kV.
Ion beam width: 500 μm (FWHM).
Milling speed: 500 μm/h (at accelerating voltage 8kV; Specimen Si; 100 μm from edge).
Sample size: Maximum specimen size of 11 mm (W) x 8 mm (L) x 3 mm (T).
Specimen holder ultimate cooling temperature: – 120 oC or less.
Specimen cooling hold time: 8 h or more.
Air isolation system: transfer vessel.