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Instrument model:

JEOL IB-19520CCP Cross Section Polisher.

Technology Description:

The instrument is suitable for the preparation of pristine cross-sections of a specimen for analytical scanning electron microscopy (SEM-EDS), electron probe microanalysis (EPMA), or scanning probe microscopy (SPM). Cross-sections of layered materials, metals, ceramics, porous materials or even plastics and paper can be prepared with little roughness over a wide area (larger than 500μm). Thermal damage of heat-sensitive materials (e.g., low melting point metals and composite materials) can be reduced by cooling the specimen with liquid nitrogen during processing. A transfer vessel allows vacuum transfer of the polished sample to our JEOL IT-300 SEM without exposure to air.

Technical Information:

Accelerating voltage: 2 - 8 kV.

Ion beam width: 500 μm (FWHM).

Milling speed: 500 μm/h (at accelerating voltage 8kV; Specimen Si; 100 μm from edge).

Sample size: Maximum specimen size of 11 mm (W) x 8 mm (L) x 3 mm (T).

Specimen holder ultimate cooling temperature: – 120 oC or less.

Specimen cooling hold time: 8 h or more.

Air isolation system: transfer vessel.


Tool name:
Cross Section Polisher
Corridor O2.1A
Sample preparation
Tool rate:


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