This is a deep-level transient spectroscopy (DLTS) setup where the temperature is swept in the range of 150K to 650K while the device under test is pulsed at a constant frequency. The setup is optimized for wide band gap materials. Defect charge state recovery causes the capacitance transient. The voltage pulse followed by the defect charge state recovery is cycled allowing an application of different signal processing methods for defect recharging process analysis.

The setup consists of several instruments controlled by a Windows 7 computer using various LabVIEW programs for different purposes. The LabVIEW programs can be found at “D:\Measurement Programs”.