Picture of Moorfield - DC/RF Magnetron sputter
Current status:
WARNING
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Responsibles
1st Responsible:
Vegard Skiftestad Olsen
2nd Responsible:
Halvor Dolva
Files
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Description

Type: Moorfield

Source: 1 DC: and 2 RF

Target: 3 x 3'' 

Targets available: Al, ZnO, SiO2. More targets are available on request.

Gas: Argon and Nitrogen

Details
Tool name:
Moorfield - DC/RF Magnetron sputter
Area/room:
Clean Room
Category:
Thin film deposition
Manufacturer:
Moorefield
Model:
MiniLab
Tool rate:
C
Booking
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:
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Tool Modes
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