Picture of Probe station
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Viktor Bobal
2nd Responsible:
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Description

Technology Description:

 

  This semi-automatic system has four probes and the ability to measure currents down to the pA-range. It may handle wafers up to 8” in size and has a reproducibility of ±4µm. This programmable system may be used for efficient electrical characterization (like CV and IV) on the wafer level.

Technical Information:

 Type: Pegasus S200FA. Wentworth Laboratories

Agilent 4284A precision LCR meter (20Hz- 1MHz)

Keithley 617 programmable electrometer

Keithley 2440 5A Sourcemeter
Details
Tool name:
Probe station
Area/room:
MiNaLab Probe room
Category:
Characterization
Manufacturer:
Wentworth Laboratories
Model:
Pegasus S200FA
Tool rate:
A
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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