Picture of Scanning Probe Microscope
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Technology Description:

Scanning probe microscope (SPM) capable of topography mapping with nanometer in-plane resolution and sub-nanometer height resolution when operating in atomic force microscopy (AFM) mode. Qualitative measurements of the local resistivity of (semi)conducting samples can be simultaneously obtained when operating the instrument in scanning spreading resistance microscopy (SSRM) mode. The applications of SSRM include the determination of dopant distributions and pn-junction delineation in semiconductor materials. An open-loop sample cooling system allows measurements at temperatures down to 80 K in a high vacuum (<  torr).

Measurement Modes:

Note that the Nanonics SPM is based on the tuning fork principle (and not the more conventional beam-bounce principle). Measurements can be carried out in the temperature range of 80 - 300 K.

Atomic force microscopy (AFM).

Scanning spreading resistance microscopy (SSRM).

Technical Information:

Sample size: Stage accommodating flat samples (< 70 g) of approx. 40 mm diameter and 3 mm height.

Temperature range: Measurements at temperatures 80 – 300 K.

Measurements in atmospheric pressure or high vacuum.

AFM probe tip radius: 20 nm.

SSRM probe tip radius: Pt/Ir probes with 200 nm tip radius.

Software: Proprietary measurement software but files can be exported in the WsXM .stp format.


Tool name:
Scanning Probe Microscope
Characterization room
Surface analysis & TEM
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