Picture of Tube 4 - 4-stack furnace
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Viktor Bobal
2nd Responsible:
Files
You must be logged in to view files.
Description

Material Class:

 Si, SiC

Technology Description:

 

 Conventional tube furnaces for heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C.

Technical Information:

 Temperature range: 25-1100C

Tube 4:

Materials: Si, SiC

Ambient: O, H2O

 

Details
Tool name:
Tube 4 - 4-stack furnace
Area/room:
MiNaLab Clean Room
Category:
Thermal processes
Manufacturer:
ThermCo
Model:
ThermCo
Tool rate:
B
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.