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Tube 4 - 4-stack furnace (UiO020-4)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Viktor Bobal
2nd Responsible:
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Description
Material Class:
Si, SiC
Technology Description:
Conventional tube furnaces for heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C.
Technical Information:
Temperature range
: 25-1100C
Tube 4:
Materials
: Si, SiC
Ambient
: O, H2O
Details
Tool name:
Tube 4 - 4-stack furnace
Area/room:
MiNaLab Clean Room
Category:
Thermal processes
Manufacturer:
ThermCo
Model:
ThermCo
Tool rate:
B
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