Picture of Tube 2 - 4-stack furnace
Current status:
AVAILABLE
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2nd Responsible:
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Material Class:

Si

Technology Description:

 

Conventional tube furnaces for heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C.

Technical Information:

Temperature range: 25-1100C

Tube 2:

Materials: Si

Ambient: N, H

 

Tool name:
Tube 2 - 4-stack furnace
Area/room:
Clean Room
Category:
Thermal processes
Manufacturer:
ThermCo
Model:
ThermCo
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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