Picture of Ellipsometer
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Kristin Bergum
2nd Responsible:
Viktor Bobal
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Description

Material Class:

 Transparent solids

Technology Description:

 Ellipsometry can probe the complex refractive index or dielectric function tensor, which gives access to fundamental physical parameters and is related to a variety of sample properties. It is commonly used to characterize film thickness for single layers or complex multilayer stacks ranging from a nanometers to several micrometers.

Technical Information:

 Type: Woolam Alpha SE.

Spectral range: 380 - 900 nm.

Angle of incidence: 65º, 70º, 75º, or 90º.

Data accousition rates: 3 sec (Fast mode), 10 sec (Standard mode), 30 sec (High precision mode).

Beam diameter: ~3mm.
Details
Tool name:
Ellipsometer
Area/room:
Clean Room
Category:
Characterization
Manufacturer:
Woolam
Model:
AlphaSE
Tool rate:
A
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Tool Modes
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