Picture of Thermal evaporator
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Kristin Bergum
2nd Responsible:
Viktor Bobal
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Description

Material Class:

 Vacuumcompatible solids

Technology Description:

 Conventional thermal evaporation chamber for resistive heating and evaporation of metals onto a target. The e-beam evaporator at UiO MiNaLab can only deposit one metal during one cycle.

Technical Information:

 Type: Balzers BAE 250 coating system

Ultimate vacuum: 1 x 10-6 mbar.

Metals: Al, Au, Ag, Ni, Zn, Sn, In

 

Details
Tool name:
Thermal evaporator
Area/room:
MiNaLab Clean Room
Category:
Thin film deposition
Manufacturer:
Balzers
Model:
BAE 250
Tool rate:
B
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Instructors

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Tool Modes
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