Picture of Thermal evaporator
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Material Class:

Vacuumcompatible solids

Technology Description:

 

Conventional thermal evaporation chamber for resistive heating and evaporation of metals onto a target. The e-beam evaporator at UiO MiNaLab can only deposit one metal during one cycle.

Technical Information:

Type: Balzers BAE 250 coating system

Ultimate vacuum: 1 x 10-6 mbar.

Metals: Al, Au, Ag, Ni, Zn, Sn, In

 

Tool name:
Thermal evaporator
Area/room:
Clean Room
Category:
Thin film deposition
Manufacturer:
Balzers
Model:
BAE 250
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

You must be logged in to view tool modes.