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Pulsed laser deposition - Excimer laser (UiO056-3)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Magnus Andreassen
2nd Responsible:
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Description
Details
Tool name:
Pulsed laser deposition - Excimer laser
Area/room:
MiNaLab Clean Room
Category:
Thin film deposition
Manufacturer:
Coherent
Model:
Compex Pro 205F
Tool rate:
A
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