Technical
Description:

Atomic force microscopy (AFM) capable of topography mapping with nanometer in-plane resolution and sub-nanometer height resolution Qualitative measurements of the local resistivity of (semi)conducting samples can be simultaneously obtained when operating the instrument in scanning spreading resistance microscopy (SSRM) mode. The applications of SSRM include the determination of dopant distributions and pn-junction delineation in semiconductor materials.

Measurement
modes:

Atomic force microscopy (AFM).

Scanning spreading microscopy (SSRM).

Tunnelling  Atomic  Force  Microscopy (TUNA) .

Technical Information:

Sample size: 150 mm diameter 12 mm thick

Stage movement x-y: 150 mm with 2 micron resolution

Video optics with zoom: 150-675 micron viewing area

Piezo scan head range: 90 micron x-y and 6 micron in z

Resolution: 16 bits DAC giving sub nanometer resolution

Measurement size: Max 512 x 512 samples/image

Mode: Contact and tapping mode AFM

Conductive AFM: Yes    

AFM probe tip radius: <10 nm.  Default probe (in the lab)for tapping mode   HQ:NSC35/Al BS                                                                                          

SSRM probe tip radius: Pt/Ir probes with 200 nm tip radius.

Software: Prorieatity measurement software but   “Gwyddion”  is Free.