Picture of Tube 1 - 4-stack furnace
Current status:
AVAILABLE
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Material Class:

Si, SiC

Technology Description:

 

Conventional tube furnaces for oxidation (dry, wet) and heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C.

Technical Information:

Temperature range: 400-1150C

Tube 1:SiC Oxidation; Tube 2:Si Oxidation; Tube 3:Si High Temp. Annealing;

Tube 4:Si Contact Annealing

Materials: Si; SiC

Ambient: O2; N2; H2N2 (FORMIER 10)

 

Tool name:
Tube 1 - 4-stack furnace
Area/room:
Clean Room
Category:
Thermal processes
Manufacturer:
ThermCo
Model:
ThermCo
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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