Picture of Tube 1 - 4-stack furnace
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Viktor Bobal
2nd Responsible:
Files
You must be logged in to view files.
Description

Material Class:

 Si, SiC

Technology Description:

 

 Conventional tube furnaces for oxidation (dry, wet) and heat treatment. Totally 10 furnaces are availble covering a temperature range up to 1800C.

Technical Information:

 Temperature range: 400-1150C

Tube 1:SiC Oxidation; Tube 2:Si Oxidation; Tube 3:Si High Temp. Annealing;

Tube 4:Si Contact Annealing

Materials: Si; SiC

Ambient: O2; N2; H2N2 (FORMIER 10)

 

Details
Tool name:
Tube 1 - 4-stack furnace
Area/room:
MiNaLab Clean Room
Category:
Thermal processes
Manufacturer:
ThermCo
Model:
ThermCo
Tool rate:
B
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.