Picture of Stylus profiler - Clean room
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Viktor Bobal
2nd Responsible:
Kristin Bergum
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Description

Material Class:

 Textured surfaces

Technology Description:

 Stylus profilometry performs 2D- and 3D-surface profile measurements to characterize film thickness, roughness, and stress on samples up to 200 mm (8 in.) in diameter. The operation of the profilometer is based on a sharp stylus that is scanned across a surface so that the surface topography of the sample is obtained. User-programmable stylus force allows profiling on hard and soft surfaces.

Technical Information:

 Vertical range: 1 Å to 1 mm.

Vertical resolution: 1 Å.

Maximum wafer size: 200 mm (diameter).

Stylus force: programmable, 1 mg - 15 mg.

Stylus options: 2 μm radius.

Stiching capability: yes.

Stress measurements: 2D stress measurement capability.

3D mapping: 3D mapping collection and analysis capability.

Software: Vision ® 64 Operation and Analysis software. 
Details
Tool name:
Stylus profiler - Clean room
Area/room:
MiNaLab Clean Room
Category:
Characterization
Manufacturer:
Bruker
Model:
DektakXT-A
Tool rate:
B
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Tool Modes
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