The Flextrua cluster growth tool at the Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is connected to an analysis chamber for advanced sample characterization. A plethora of concomitant surface science techniques are available that utilise a variety of photon sources, a state-of-the-art hemispherical electron analyser and low energy electron diffraction optics. The LEED system can resolve the crystalline structure from the top few nanometers of the sample surface.
System manipulator: Motorised sample manipulator accommodating up to 20 samples with max dimensions of 10x10x1 mm samples. Smaller surface area samples can be measured down to 3x3 mm. LEED analysis on all samples pockets possible.
Low vacuum: 5x10-7 - 5x10-10 mBar base pressure.
Source: Er-LEED 3000 Low energy electron diffraction optics 10-3000 eV kinetic energies.
Lateral resolution: 0.01 mm.