<table border="0" cellpadding="2" cellspacing="2"> <tbody> <tr> <td> <table border="0" cellpadding="2" cellspacing="2"> <tbody> <tr> <td> <p><strong>Material Class:</strong></p> </td> <td>Textured surfaces</td> </tr> <tr> <td> <p><strong>Technology Description:</strong></p> </td> <td>Stylus profilometry performs 2D- and 3D-surface profile measurements to characterize film thickness, roughness, and stress on samples up to 200 mm (8 in.) in diameter. The operation of the profilometer is based on a sharp stylus that is scanned across a surface so that the surface topography of the sample is obtained. User-programmable stylus force allows profiling on hard and soft surfaces.</td> </tr> <tr> <td> <p><strong>Technical Information:</strong></p> </td> <td><strong>Vertical range</strong>: 25 &Aring; to&nbsp;262 &mu;m. <p><strong>Vertical resolution</strong>: 1 &Aring; max (at 6.55 &mu;m range).</p> <p><strong>Scan length range</strong>: 50 &mu;m to 50 mm.</p> <p><strong>Scan duration range</strong>: 3 s to 100 s.</p> <p><strong>Maximum sample thickness</strong>: 25.4 mm.</p> <p><strong>Maximum wafer size</strong>: 200 mm (diameter).</p> <p><strong>Maximum sample weight</strong>: 2.5 kg.</p> <p><strong>Stylus force</strong>: programmable, 1 mg - 15 mg.</p> <p><strong>Stylus options:</strong> Diamond-tipped, 12.5&nbsp;&mu;m radius (standard) and 5&nbsp;&mu;m radius (for scratch-free characterization of delicate sample, e.g., Au or oxide films).</p> <p><strong>Software:</strong> Vision &reg; 32 3D analysis package; D8-STRESS software.&nbsp;</p> </td> </tr> </tbody> </table> </td> </tr> </tbody> </table> <p>&nbsp;</p>